Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1181-1186
http://dx.doi.org/10.1351/pac199870061181
Plasmasurface interactions in the processing of iiiv semiconductor materials
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Pure Appl. Chem., 1998, Vol. 70, No. 6, pp. 1181-1186
http://dx.doi.org/10.1351/pac199870061181