Fast deposition of thin amorphous layers using an expanding thermal plasma

PAC → Archive → Vol. 68 (1996) → Issue 5 → Fast deposition of thin amorphous layers…

Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1155-1158

http://dx.doi.org/10.1351/pac199668051155

M. C. M. van de Sanden, J. W. A. M. Gielen, R. J. Severens, R. M. J. Paffen and D. C. Schram

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Pure and Applied Chemistry