Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1143-1149
http://dx.doi.org/10.1351/pac199668051143
Plasma deposition of amorphous silicon alloys from fluorinated gases
First page:
Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1143-1149
http://dx.doi.org/10.1351/pac199668051143