Formation of dense submicronic clouds in low pressure Ar-SiH<sub>4</sub> RF reactor: Diagnostics and growth processes from monomers to large size particulates

PAC → Archive → Vol. 68 (1996) → Issue 5 → Formation of dense submicronic clouds…

Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1121-1126

http://dx.doi.org/10.1351/pac199668051121

Formation of dense submicronic clouds in low pressure Ar-SiH₄ RF reactor: Diagnostics and growth processes from monomers to large size particulates

A. Bouchoule, L. Boufendi, J. Hermann, A. Plain, T. Hbid, G. Kroesen, E. Stoffels and W. W. Stoffels

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