Pure and Applied Chemistry, 1996, Volume 68, No. 5, pp. 1055-1058, Other PAC articles by these authors

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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1055-1058

http://dx.doi.org/10.1351/pac199668051055

Radio frequency inductive discharge source design for large area processing

A. E. Wendt and L. J. Mahoney

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Other PAC articles by these authors

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