Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1055-1058
http://dx.doi.org/10.1351/pac199668051055
Radio frequency inductive discharge source design for large area processing
First page:
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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1055-1058
http://dx.doi.org/10.1351/pac199668051055