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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1029-1034

http://dx.doi.org/10.1351/pac199668051029

Characterisation of plasmas by advanced diagnostic methods

K. Wiesemann

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  • Hohl Markus, Wurz Peter, Bochsler Peter: Investigation of the density and temperature of electrons in a compact 2.45 GHz electron cyclotron resonance ion source plasma by x-ray measurements. Plasma Sources Sci Technol 2005, 14, 692. <http://dx.doi.org/10.1088/0963-0252/14/4/008>
  • Meyer D., Schmitz H., Daube Th., Mannel C., Wiesemann K.: Influence of plasma-wall interaction on high charge state production in electron cyclotron resonance ion sources. Rev Sci Instrum 2000, 71, 660. <http://dx.doi.org/10.1063/1.1150341>
  • Wijesundara Muthu B. J., Ji Yuan, Ni Boris, Sinnott Susan B., Hanley Luke: Effect of polyatomic ion structure on thin-film growth: Experiments and molecular dynamics simulations. J Appl Phys 2000, 88, 5004. <http://dx.doi.org/10.1063/1.1315329>
  • Wijesundara M. B. J., Hanley L., Ni B., Sinnott S. B.: Effects of unique ion chemistry on thin-film growth by plasma-surface interactions. Proceedings of the National Academy of Sciences 2000, 97, 23. <http://dx.doi.org/10.1073/pnas.97.1.23>