Pure and Applied Chemistry, 1996, Volume 68, No. 5, pp. 1017-1022

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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1017-1022

http://dx.doi.org/10.1351/pac199668051017

From molecules to particles in silane plasmas

A. A. Howling, C. Courteille, J.-L. Dorier, L. Sansonnens and Ch. Hollenstein

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Conference

12th International Symposium on Plasma Chemistry, Minneapolis, USA, 21–26 August 1995

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Cited by 22 articles Other PAC articles by these authors

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