Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1373-1380
http://dx.doi.org/10.1351/pac199466061373
Plasma and surface diagnostics in PECVD (plasma-enhanced chemical vapor deposition) from silicon containing organic monomers
First page:
![First page image](/publications/pac/pdf/first_pages/6606x1373.jpg)
Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1373-1380
http://dx.doi.org/10.1351/pac199466061373