Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1363-1372
http://dx.doi.org/10.1351/pac199466061363
Self consistent low pressure RF (radiant flux) discharge modelling: Comparisons with experiments in clean and dusty plasmas
First page:
Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1363-1372
http://dx.doi.org/10.1351/pac199466061363