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Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1353-1362

Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets

Y. Khairallah, F. Khonsari-Arefi and J. Amouroux

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Other PAC articles by these authors

F. Arefi, V. Andre, P. Montazer-Rahmati and J. Amouroux
Plasma polymerization and surface treatment of polymers
1992, Vol. 64, Issue 5, pp. 715-723 [Details] [Full text - pdf 860 kB]
J. Amouroux, A. Gicquel, S. Cavvadias, D. Morvan and F. Arefi
Progress in the applications of plasma surface modifications and correlations with the chemical properties of the plasma phase
1985, Vol. 57, Issue 9, pp. 1207-1222 [Details] [Full text - pdf 405 kB]