Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1353-1362
http://dx.doi.org/10.1351/pac199466061353
Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets
Individual author index pages
Other PAC articles by these authors
Plasma polymerization and surface treatment of polymers
Progress in the applications of plasma surface modifications and correlations with the chemical properties of the plasma phase