Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1353-1362
http://dx.doi.org/10.1351/pac199466061353
Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets
First page:
![First page image](/publications/pac/pdf/first_pages/6606x1353.jpg)