Decomposition of gaseous dielectrics (CF<sub>4</sub>,SF<sub>6</sub>) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets

PAC → Archive → Vol. 66 (1994) → Issue 6 → Decomposition of gaseous dielectrics…

Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1353-1362

http://dx.doi.org/10.1351/pac199466061353

Decomposition of gaseous dielectrics (CF₄,SF₆) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets

Y. Khairallah, F. Khonsari-Arefi and J. Amouroux

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