Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1343-1352
http://dx.doi.org/10.1351/pac199466061343
Processing of electronic materials by microwave plasma
First page:
Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1343-1352
http://dx.doi.org/10.1351/pac199466061343