Pure and Applied Chemistry, 1994, Volume 66, No. 6, pp. 1311-1318, Cited by

Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1311-1318

http://dx.doi.org/10.1351/pac199466061311

The reactive sputtering of oxides and nitrides

R. P. Howson

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