Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1311-1318
http://dx.doi.org/10.1351/pac199466061311
The reactive sputtering of oxides and nitrides
First page:
Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1311-1318
http://dx.doi.org/10.1351/pac199466061311