Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 697-702
http://dx.doi.org/10.1351/pac199264050697
Control of reactive plasmas: adventure to improve and to expand plasma processing
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Pure Appl. Chem., 1992, Vol. 64, No. 5, pp. 697-702
http://dx.doi.org/10.1351/pac199264050697