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Pure Appl. Chem., 1990, Vol. 62, No. 1, pp. 89-101

Role of high temperature chemistry in CVD (chemical vapor deposition) processing

K. E. Spear and R. R. Kirkx

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Other PAC articles by these authors

K. E. Spear, M. Weinmann and J. Bill
1998, Vol. 70, Issue 2, pp. ii [Details]
K. E. Spear and M. Frenklach
High-temperature chemistry of CVD (chemical vapor deposition) diamond growth
1994, Vol. 66, Issue 9, pp. 1773-1782 [Details] [Full text - pdf 903 kB]
K. E. Spear
Principles and applications of chemical vapor deposition (CVD)
1982, Vol. 54, Issue 7, pp. 1297-1311 [Details] [Full text - pdf 544 kB]