Pure and Applied Chemistry, 1990, Volume 62, No. 1, pp. 89-101, Cited by

Pure Appl. Chem., 1990, Vol. 62, No. 1, pp. 89-101

http://dx.doi.org/10.1351/pac199062010089

Role of high temperature chemistry in CVD (chemical vapor deposition) processing

K. E. Spear and R. R. Kirkx

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