Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 633-644
http://dx.doi.org/10.1351/pac198860050633
Plasma deposition of amorphous silicon films: an overview on some open questions
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Pure Appl. Chem., 1988, Vol. 60, No. 5, pp. 633-644
http://dx.doi.org/10.1351/pac198860050633