Pure Appl. Chem., 1988, Vol. 60, No. 3, pp. 437-444
http://dx.doi.org/10.1351/pac198860030437
ANALYTICAL CHEMISTRY DIVISION
COMMISSION ON MICROCHEMICAL TECHNIQUES AND TRACE ANALYSIS
Critical evaluation of calibration procedures for distribution analysis of dopant elements in silicon and gallium arsenides
CrossRef Cited-by Linking
- Becker J.Sabine, Dietze Hans-Joachim: State-of-the-art in inorganic mass spectrometry for analysis of high-purity materials. Int J Mass Spectrosc 2003, 228, 127. <http://dx.doi.org/10.1016/S1387-3806(03)00270-7>
- Becker Johanna Sabine, Dietze Hans-Joachim: Inorganic trace analysis by mass spectrometry. ATOM SPECTROSC 1998, 53, 1475. <http://dx.doi.org/10.1016/S0584-8547(98)00110-4>
- Grasserbauer M., Stingeder G., Friedbacher G., Virag A.: Quantitative trace analysis of technical materials with solid state mass spectrometry: An analytical strategy for SIMS. Surf Interface Anal 1989, 14, 623. <http://dx.doi.org/10.1002/sia.740141011>
- Grasserbauer M: Surface and interface analysis for the development of VLSI devices. This Solid Films 1989, 181, 17. <http://dx.doi.org/10.1016/0040-6090(89)90469-0>
- Grasserbauer Manfred: Ion microprobe analysis of technical materials. Microchim J 1988, 38, 24. <http://dx.doi.org/10.1016/0026-265X(88)90003-3>