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Pure Appl. Chem., 1988, Vol. 60, No. 3, pp. 437-444

http://dx.doi.org/10.1351/pac198860030437

ANALYTICAL CHEMISTRY DIVISION
COMMISSION ON MICROCHEMICAL TECHNIQUES AND TRACE ANALYSIS

Critical evaluation of calibration procedures for distribution analysis of dopant elements in silicon and gallium arsenides

M. Grasserbauer

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