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Pure Appl. Chem., 1985, Vol. 57, No. 9, pp. 1321-1352

http://dx.doi.org/10.1351/pac198557091321

The inductively coupled R.F. (radio frequency) plasma

M. I. Boulos

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Other PAC articles by these authors

M. I. Boulos
New frontiers in thermal plasma processing
1996, Vol. 68, Issue 5, pp. 1007-1010 [Details] [Full text - pdf 290 kB]