Pure and Applied Chemistry, 1984, Volume 56, No. 2, pp. 189-208, Other PAC articles by these authors

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Pure Appl. Chem., 1984, Vol. 56, No. 2, pp. 189-208

http://dx.doi.org/10.1351/pac198456020189

Optical techniques in plasma diagnostics

R. A. Gottscho and T. A. Miller

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Other PAC articles by these authors

E. S. Aydil, R. A. Gottscho and Y. J. Chabal

Real-time monitoring of surface chemistry during plasma processing

1994, Vol. 66, Issue 6, pp. 1381-1388 [Details] [Full text - pdf 618 kB]