Pure Appl. Chem., 1982, Vol. 54, No. 7, pp. 1297-1311
http://dx.doi.org/10.1351/pac198254071297
Principles and applications of chemical vapor deposition (CVD)
Individual author index pages
Other PAC articles by these authors
High-temperature chemistry of CVD (chemical vapor deposition) diamond growth
Role of high temperature chemistry in CVD (chemical vapor deposition) processing