Pure Appl. Chem., 1982, Vol. 54, No. 7, pp. 1297-1311
http://dx.doi.org/10.1351/pac198254071297
Principles and applications of chemical vapor deposition (CVD)
First page:
Pure Appl. Chem., 1982, Vol. 54, No. 7, pp. 1297-1311
http://dx.doi.org/10.1351/pac198254071297