Pure Appl. Chem., 1978, Vol. 50, No. 5, pp. 435-447
http://dx.doi.org/10.1351/pac197850050435
Gas phase diffusion and surface reactions in the chemical vapour deposition of silicon
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Pure Appl. Chem., 1978, Vol. 50, No. 5, pp. 435-447
http://dx.doi.org/10.1351/pac197850050435