CrossRef enabled

PAC Archives

Archive →

Keyword detail

Articles with keyword "plasma chemical vapor deposition"

    Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga and Yukio Watanabe
    Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition