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Articles by M. Shiratani


The following name might also represent this author:

Masaharu Shiratani

  • Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga and Yukio Watanabe
    Control of deposition profile of Cu for large-scale integration (LSI) interconnects by plasma chemical vapor deposition

Coauthors

Affiliations

  • Faculty of Information Science and Electrical Engineering, Kyushu University, Fukuoka 812-8581, Japan