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Pure Appl. Chem., 2010, Vol. 82, No. 6, pp. 1247-1258

Published online 2010-04-20

High-power impulse magnetron sputtering and its applications

Arutiun P. Ehiasarian

Nanotechnology Centre for PVD Research, Materials and Engineering Research Institute, Sheffield Hallam University, Howard St., Sheffield, S1 1WB, UK

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