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Pure Appl. Chem., 2005, Vol. 77, No. 2, pp. 399-414

http://dx.doi.org/10.1351/pac200577020399

Deposition mechanism of nanostructured thin films from tetrafluoroethylene glow discharges

A. Milella1, F. Palumbo2, P. Favia1, G. Cicala2 and R. d’Agostino1

1 Dipartimento di Chimica, Università degli Studi di Bari, via Orabona 4, 70126 Bari, Italy
2 Istituto di Metodologie Inorganiche e dei Plasmi, CNR-IMIP, via Orabona 4, 70126 Bari, Italy

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