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Pure Appl. Chem., 2005, Vol. 77, No. 2, pp. 379-389

http://dx.doi.org/10.1351/pac200577020379

Exploration of the deposition limits of microcrystalline silicon

D. Mataras

Plasma Technology Laboratory, Department of Chemical Engineering, University of Patras, P.O. Box 1407, 26504 Patras, Greece

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