Pure and Applied Chemistry, 2002, Volume 74, No. 3, pp. 397-400, Other PAC articles by these authors

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Pure Appl. Chem., 2002, Vol. 74, No. 3, pp. 397-400

http://dx.doi.org/10.1351/pac200274030397

Diagnostics of etching plasmas

Jean-Paul Booth

Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, 91128 Palaiseau, France

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Jean-Paul Booth

Other PAC articles by these authors

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