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Pure Appl. Chem., 1999, Vol. 71, No. 10, pp. 1845-1852

http://dx.doi.org/10.1351/pac199971101845

Non-equilibrium effects in pulse modulated induction thermal plasma for advanced material processing

T. Sakuta and T. Ishigaki

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  • Ye Rubin, Ishigaki Takamasa: Nonequilibrium situations in a pulse-modulated Ar–H2 inductively coupled thermal plasma for hydrogen doping. This Solid Films 2008, 516, 4407. <http://dx.doi.org/10.1016/j.tsf.2007.10.065>
  • ISHIGAKI Takamasa: Synthesis of ceramic nanoparticles with non-equilibrium crystal structures and chemical compositions by controlled thermal plasma processing. J Ceram Soc Japan 2008, 116, 462. <http://dx.doi.org/10.2109/jcersj2.116.462>
  • Ishigaki Takamasa, Ohashi Naoki, Taguchi Hiroyuki, Ye Rubin, Haneda Hajime, Ito Shigeru: Improved UV emission of zinc oxide through hyrogen doping in pulse-modulated high-power ICP. This Solid Films 2006, 506-507, 303. <http://dx.doi.org/10.1016/j.tsf.2005.08.270>
  • Ye Rubin, Ishigaki Takamasa, Taguchi Hiroyuki, Ito Shigeru, Murphy Anthony B., Lange Hubert: Characterization of the behavior of chemically reactive species in a nonequilibrium inductively coupled argon-hydrogen thermal plasma under pulse-modulated operation. J Appl Phys 2006, 100, 103303. <http://dx.doi.org/10.1063/1.2364623>
  • Tanaka Yasunori: Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar?N2 pulse-modulated inductively coupled plasmas at atmospheric pressure. J Phys D Appl Phys 2006, 39, 307. <http://dx.doi.org/10.1088/0022-3727/39/2/011>
  • ISHIGAKI Takamasa: Journal of The Surface Finishing Society of Japan 2006, 57, 18. <http://dx.doi.org/10.4139/sfj.57.18>
  • Ye R., Ishigaki T.: Modeling of transient nonequilibrium phenomena in an inductively coupled plasma under pulsed power conditions. J Appl Phys 2005, 97, 123306. <http://dx.doi.org/10.1063/1.1931036>
  • Ye Rubin, Ishigaki Takamasa, Sakuta Tadahiro: Controlled generation of pulse-modulated RF plasmas for materials processing. Plasma Sources Sci Technol 2005, 14, 387. <http://dx.doi.org/10.1088/0963-0252/14/2/022>
  • Ye R., Ishigaki T., Boulos M. I.: Modeling of an induction plasma under transient turbulent flow conditions. J Appl Phys 2004, 96, 118. <http://dx.doi.org/10.1063/1.1760231>
  • Ishigaki Takamasa, Haneda Hajime, Okada Nobuhiro, Ito Shigeru: Surface modification of titanium oxide in pulse-modulated induction thermal plasma. This Solid Films 2001, 390, 20. <http://dx.doi.org/10.1016/S0040-6090(01)00935-X>