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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1155-1158

Fast deposition of thin amorphous layers using an expanding thermal plasma

M. C. M. van de Sanden, J. W. A. M. Gielen, R. J. Severens, R. M. J. Paffen and D. C. Schram

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