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Pure Appl. Chem., 1996, Vol. 68, No. 5, pp. 1017-1022

http://dx.doi.org/10.1351/pac199668051017

From molecules to particles in silane plasmas

A. A. Howling, C. Courteille, J.-L. Dorier, L. Sansonnens and Ch. Hollenstein

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  • Gordillo-Vázquez F. J., Herrero V. J., Tanarro I.: From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low-Pressure PECVD. Chem Vap Deposition 2007, 13, 267. <http://dx.doi.org/10.1002/cvde.200604034>
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  • Hollenstein Ch., Howling A. A., Courteille C., Dorier J.-L., Sansonnens L., Magni D., Müller H.: Dust Particle Diagnostics in Rf Plasma Deposition of Silicon and Silicon Oxide Films (Invited). MRS Proc 1998, 507, 547. <http://dx.doi.org/10.1557/PROC-507-547>
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