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Pure Appl. Chem., 1995, Vol. 67, No. 2, pp. 313-318

Coordination chemistry routes to films for superconducting electronics

T. J. Marks

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  • George Sheby Mary, Park Bo Keun, Kim Chang Gyoun, Chung Taek-Mo: Heteroleptic Group 2 Metal Precursors for Metal Oxide Thin Films. Eur. J. Inorg. Chem. 2014, 2014, 2002. <>
  • Lo Nigro Raffaella, Fiorenza Patrick, Catalano Maria R., Fisichella Gabriele, Roccaforte Fabrizio, Malandrino Graziella: Binary and complex oxide thin films for microelectronic applications: An insight into their growth and advanced nanoscopic investigation. Surface and Coatings Technology 2013, 230, 152. <>
  • George Sheby M., Yon Gyu Hwan, Park Bo Keun, Lee Kang Mun, Do Youngkyu, Kim Chang Gyoun, Chung Taek-Mo: Synthesis and structure of novel strontium complexes of unsymmetrically functionalized β-diketimine ligands. Inorg Chim Ada 2012, 383, 67. <>
  • Basova Tamara V., Kiselev Vitaly G., Filatov Egor S., Sheludyakova Liliya A., Igumenov Igor K.: Experimental and theoretical study of vibrational spectra of palladium(II) β-diketonates. Vibrational Spectroscopy 2012, 61, 219. <>
  • Belot John A., McNeely Richard J., Wang Anchuan, Reedy Charles J., Marks Tobin J., Yap Glenn P. A., Rheingold Arnold L.: Expedient route to volatile zirconium metal-organic chemical vapor deposition precursors using amide synthons and implementation in yttria-stabilized zirconia film growth. J. Mater. Res. 2012, 14, 12. <>
  • George Sheby M., Yon Gyu-Hwan, Park Bo-Keun, Lee Kang-Mun, Do Young-Kyu, Kim Chang-Gyoun, Chung Taek-Mo: Synthesis and Structural Characterization of Strontium Complex of Symmetrically Functionalized β-Diketimine Ligand. Bulletin of the Korean Chemical Society 2012, 33, 2059. <>
  • Pointillart Fabrice, Boubekeur Kamal, Herson Patrick, Train Cyrille: Barium one-dimensional coordination polymers from barium β-diketonates and 2,2′-bipyrimidine derivatives. CrystEngCommun 2010, 12, 3430. <>
  • Kuzmina Natalia P., Tsymbarenko Dmitry M., Korsakov Igor E., Starikova Zoya A., Lysenko Kostantin A., Boytsova Olga V., Mironov Andrey V., Malkerova Irina P., Alikhanyan Andrey S.: Mixed ligand complexes of AEE hexafluoroacetylacetonates with diglyme: Synthesis, crystal structure and thermal behavior. J Polyhedron 2008, 27, 2811. <>
  • Lopes W. S., Morais Crislene R. S., Souza A. G., Leite V. D., de A. Firmo B. D.: Study of isothermal decomposition of lanthanide mixed complexes with 2,2,6,6-tetramethyl-3,5-heptanodione and 1,10-phenanthroline. J Therm Anal Calorim 2007, 87, 841. <>
  • Jones Anthony C., Aspinall Helen C., Chalker Paul R.: Molecular design of improved precursors for the MOCVD of oxides used in microelectronics. Surface Coatings and Technology 2007, 201, 9046. <>
  • Kreinin O., Kuzmina N.P., Zolotoyabko E., Kaul A.R.: Rapid thermal two-stage metal-organic chemical vapor deposition growth of epitaxial BaTiO3 thin films. This Solid Films 2007, 515, 6442. <>
  • Yamamura Tomoo, Shirasaki Kenji, Sato Hironori, Nakamura Yoshiyuki, Tomiyasu Hiroshi, Satoh Isamu, Shiokawa Yoshinobu: Enhancements in the Electron-Transfer Kinetics of Uranium-Based Redox Couples Induced by Tetraketone Ligands with Potential Chelate Effect. J. Phys. Chem. C 2007, 111, 18812. <>
  • Lo Nigro R., Malandrino G., Toro R. G., Fragalà I. L.: An MOCVD Approach to High-k Praseodymium-Based Films. Chem Vap Deposition 2006, 12, 109. <>
  • Malandrino Graziella, Fragalà Ignazio L.: Lanthanide “second-generation” precursors for MOCVD applications: Effects of the metal ionic radius and polyether length on coordination spheres and mass-transport properties. Coord Chem Rev - 2006, 250, 1605. <>
  • Bousman Kenneth S., Toscano Paul J., Welch John T.: The effect of sulfur on CVD performance of Pd(II) β-diketonate precursors and the completion of a structural trans-influence series: synthesis and structural characterization of Pd(S,S-tmhd)2. Inorganica Chimica Acta 2004, 357, 3871. <>
  • Claessen Rolf U, Kornilov Andrei M, Banger Kulbinder K, Ngo Silvana C, Higashiya Seiichiro, Wells Christopher C, Dikarev Evgeny V, Toscano Paul J, Welch John T: Investigations into the preparation of sila-β-diketones via 2-trimethylsilyl-1,3-dithianes: structural characterization of a second polymorph of bis(2,2,6,6-tetramethyl-2-sila-3,5-heptanedionato)copper(II). J Organomet Chem 2004, 689, 71. <>
  • DelaRosa Mark J, Banger Kulbinder K, Higashiya Seiichiro, Ngo Silvana C, Hunt Daniel H, Bousman Kenneth S, Toscano Paul J, Welch John T: Structural investigations of copper(II) complexes containing fluorine-substituted β-diketonate ligands. J FLUORINE CHEM 2003, 123, 109. <>
  • Banger Kulbinder K, Ngo Silvana C, Higashiya Seiichiro, Claessen Rolf U, Bousman Kenneth S, Lim Poay N, Toscano Paul J, Welch John T: Facile synthesis of a novel class of organometalloid-containing ligands, the sila-β-diketones: preparation and physical and structural characterization of the copper(II) complexes, Cu[R′C(O)CHC(O)SiR3]2. J Organomet Chem 2003, 678, 15. <>
  • Ngo Silvana C, Banger Kulbinder K, DelaRosa Mark J, Toscano Paul J, Welch John T: Thermal and structural characterization of a series of homoleptic Cu(II) dialkyldithiocarbamate complexes: bigger is only marginally better for potential MOCVD performance. J Polyhedron 2003, 22, 1575. <>
  • Delarosa Mark J., Bousman Kenneth S., Welch John T., Toscano Paul J.: Structural investigations of copper(II) complexes containing unsymmetrical β-diketonate and monothio-β-diketonate ligands. J Coord Chem 2003, 56, 1339. <>
  • Synthesis and Characterization of an Eight-Coordinated [Ho(hfa)₂(triglyme)][Ho(hfa)₄] Holmium Complex. Bulletin of the Korean Chemical Society 2003, 24, 535. <>
  • Bae Byoung-Jae, Park Joon T, Suh Il-Hwan: Synthesis and characterization of monomeric Ba and Sr complexes with malonate and Lewis base ligands. J Organomet Chem 2002, 648, 214. <>
  • Chiang Wen-Chung, Chisholm Malcolm H., DiStasi Vincent F., Dutremez Sylvain G., Folting Kirsten, Baxter David V., Caulton Kenneth G.: Synthesis, structural characterization, thermolysis and volatility study of the Schiff base complex Cu[CH3C(O)CHC(NCH2CH2OCH3)CH3]2. J Polyhedron 2001, 20, 2589. <>
  • Ramesh R, Aggarwal S, Auciello O: Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories. Mater Sci Eng R 2001, 32, 191. <>
  • Banger Kulbinder K., Kornilov Andrei, Claessen Rolf U., Eisenbraun Eric T., Kaloyeros Alain E., Toscano Paul J., Welch John T.: The first metal complex containing a silylated β-diketonate ligand: bis(2,2,6,6-tetramethyl-2-sila-3,5-heptanedionato) copper(II). J Inorg Chem Commun 2001, 4, 496. <>
  • Otway David J, Rees William S: Group 2 element β-diketonate complexes: synthetic and structural investigations. Coord Chem Rev - 2000, 210, 279. <>
  • Claessen Rolf U., Welch John T., Toscano Paul J., Banger Kulbinder K., Kornilov Andrei M., Eisenbraun Eric T., Kaloyeros Alain E.: The 2,2,6,6-Tetramethyl-2-Sila-3,5-Heptanedione Route to the Chemical Vapor Deposition of Copper for Gigascale Interconnect Applications. Mater Res Soc Proc 2000, 612, D6.8.1. <>
  • Edleman N.L., Belot J.A., Babcock J.R., Metz A.W., Metz M.V., Stern C.L., Marks T.J.: Volatile, Fluorine-Free β-Ketoiminate Precursors for MOCVD Growth of Lanthanide Oxide Thin Films. MRS Proc 2000, 623, 371. <>
  • Pfeiffer Dirk, Heeg Mary Jane, Winter Charles H.: Magnesiumkomplexe mit η2-Pyrazolatoliganden. Angew Chem 1998, 110, 2674. <<2674::AID-ANGE2674>3.0.CO;2-U>
  • Archer Leo, Hampden-Smith Mark J., Duesler Eileen: Synthesis, characterization and reactivity of crown ether adducts of barium carboxylates: Ba(O2CCH3)2(18-crown-6)·4H2O and Ba(O2C(CH2)4CO2)(18-crown-6)·8H2O. J Polyhedron 1998, 17, 713. <>
  • Auciello Orlando, Foster Chris M., Ramesh Rammamoorthy: PROCESSING TECHNOLOGIES FOR FERROELECTRIC THIN FILMS AND HETEROSTRUCTURES1. Annu Rev Mater Sci 1998, 28, 501. <>
  • Watson Ian M.: Metal-organic CVD of the high-Tc superconductor YBa2Cu3O7−δ. Chem Vap Deposition 1997, 3, 9. <>
  • Belot John A., Hinds Bruce J., Chen Jun, Wang Yun-Yu, Dravid Vinayak, Marks Tobin J.: New materials for superconducting electronics: Epitaxial growth of LaSrGaO4 and PrSrGaO4 dielectric thin films by MOCVD. Chem Vap Deposition 1997, 3, 78. <>
  • Tiitta Marja, Niinistou Lauri: Volatile Metal β-Diketonates: ALE and CVD precursors for electroluminescent device thin films. Chem Vap Deposition 1997, 3, 167. <>
  • Marks T.J., Belot J.A., Reedy C.J., McNeely R.J., Studebaker D.B., Neumayer D.A., Stern C.L.: MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes. J Alloys Comp 1997, 251, 243. <>
  • Soininen Pekka, Nykänen Erja, Niinistö Lauri, Leskelä Markku: Atomic layer epitaxy of strontium sulfide thin films using in situ synthesized strontium precursors. Chem Vap Deposition 1996, 2, 69. <>
  • Motevalli M., O'Brien P., Watson I.M.: X-ray crystal structures and thermal behaviour of two volatile bis(1,1,1,5,5,5-hexafluoropentane-2,4-dionato)barium-(azapolyether) complexes. J Polyhedron 1996, 15, 1865. <>
  • Eisenbraun Eric T., Zheng Bo, Kaloyeros Alain E., Toscano Paul J., Dettelbacher Claudia, Waechter John, Pavri Neville P., Hunt Daniel H.: SYNTHESIS AND CHARACTERIZATION OF POLYFLUORINATED β-DIKETONATE TRANSITION METAL COMPLEXES1,2. J Coord Chem 1996, 38, 319. <>