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Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1381-1388

Real-time monitoring of surface chemistry during plasma processing

E. S. Aydil, R. A. Gottscho and Y. J. Chabal

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Other PAC articles by these authors

R. A. Gottscho and T. A. Miller
Optical techniques in plasma diagnostics
1984, Vol. 56, Issue 2, pp. 189-208 [Details] [Full text - pdf 435 kB]