Pure and Applied Chemistry, 1994, Volume 66, No. 6, pp. 1185-1193, Cited by

Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1185-1193

http://dx.doi.org/10.1351/pac199466061185

The chemistry of etching and deposition processes

R. d’Agostino, F. Fracassi and R. Lamendola

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